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New Megaflex (Inner Polished)

Recently high integration in semiconductor is prominent and following after mass production system in 90 nm process has been established, the 65 nm process is put in practical use and now it is being developed to the 45 nm process.
With these development high cleanness in semiconductor making machines and equipments must be required. Especially in the piping of process gas the vacuum double-melted clean pipe is being used for high cleanness.
Our "Megaflex" which is inner surface polished flexible metal hose have had great confidence and achievement in semiconductor industries for years is being used extremely low Mn vacuum double-melted materials and responds to the needs of the above users need for high cleanness.

[Internal surface of cross section]

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Features

Because of employing extreme low manganese vacuum double-melted steel for end pipe fittings, welded portions between corrugated hose and end pipe fittings have excellent corrosion resistance.
Internal surface roughness: Rmax. 0.7micron
Supercleaning-in-cleanroom grade

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Standard Specification

Material:Corrugated hose is made of stainess steel type 316L

spacePipe end fittings at boh ends are made of stainless steel type 316L(vacuum double-melted steel)

Working Pressure:From ultra-high vacuum to 0.5MPa (5 kg/cm2)

Max.permissible leakage:1.33x10^-10Pa ^. m³/s (1x10^-9Torr.l/s)

(UNIT:mm)