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New Megaflex (Inner Polished) |
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Recently high integration in semiconductor is prominent and following that,
mass production system in 90 nm process has been established, the
65 nm process is put in practical use and now it is being developed to the
45 nm process.
With these development high cleanness in semiconductor making
machines and equipments must be required. Especially in the piping of process gas the vacuum double-melted clean pipe is being used for high cleanness. |
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In order to respond to the above needs,
our "Megaflex", which is inner surface polished
flexible hose and has gained great confidence and
achievement in semiconductor industries, is
evolved into the next generation model called
"New Megaflex" using extremely low Mn vacuum double-melted materials to pipe fitting.
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[cross section of Internal surface] |
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Features |
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●Because of adopting extreme low manganese vacuum double-melted steel for end pipe fittings, welded portions between corrugated hose and end pipe fittings have excellent corrosion resistance. |
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●Internal surface roughness: less than Rmax. 0.7micron |
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●Supercleaning-in-cleanroom grade |
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Standard Specification |
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| ●Material |
Corrugated hose is made of stainess steel type 316L
Pipe end fittings at both ends are made of stainless steel type 316L(vacuum double-melted steel) |
| ●Working Pressure |
Max 0.5MPa ～ ultra-high vacuum
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| ●Permissible leakage |
Less than 1.33x10-10Pa.m3/sec.
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| (UNIT:mm) |
| Nominal I.D |
Model Number |
I.D |
O.D |
D |
d |
ℓ |
L |
Min. Bend Radius |
| 1/4" |
ORV-8PM-20DM |
5.5 |
8.5 |
6.35 |
4.5 |
20 |
200 |
30 |
| ORV-8PM-30DM |
300 |
| ORV-8PM-40DM |
400 |
| 3/8" |
ORV-10PM-20DM |
10.0 |
13.5 |
9.52 |
7.4 |
25 |
200 |
45 |
| ORV-10PM-30DM |
300 |
| ORV-10PM-40DM |
400 |
| 1/2" |
ORV-15PM-20DM |
12.0 |
16.0 |
12.7 |
10.3 |
30 |
200 |
45 |
| ORV-15PM-30DM |
300 |
| ORV-15PM-40DM |
400 |
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